Anti-slip scrubber brush and assembly methods

ABSTRACT

In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush including exterior molded surfaces and a mounting passage having interior molded surfaces, the interior molded surfaces having molded foam, raised rotation-restraining features, and a mandrel including recesses directly coupled to the molded foam, raised rotation-restraining features of the scrubber brush to prevent slippage. Scrubber brushes and methods of assembly are provided, as are numerous other aspects.

FIELD

The present invention relates generally to semiconductor device manufacturing, and more particularly to a scrubber brush adapted to clean a substrate.

BACKGROUND

A scrubber brush assembly, which includes a scrubber brush mounted on a mandrel, may be used for cleaning a substrate. For example, the scrubber brush assembly may be employed in a substrate processing system, such as a substrate chemical and mechanical cleaning system, to scrub a major surface of a substrate during substrate processing. Furthermore, the scrubber brush assembly may be used in other substrate processing systems.

To assemble a conventional scrubber brush assembly for use in a substrate processing system, the scrubber brush is installed (e.g., slid) onto the mandrel. However, once installed, and in operation, the scrubber brush is rotated and translated along a surface of the substrate. Prior scrubber brush assemblies have added a sleeve to the scrubber brush in an attempt to minimize slippage between the scrubber brush and the mandrel. However, such systems may be ineffective in some circumstances and/or complex and expensive. Thus, improved scrubber brushes and assemblies are desired.

SUMMARY

In a first aspect of the invention, a method of assembling a scrubber brush assembly is provided. The method include providing a scrubber brush having a scrubber brush body with a mounting passage having a molded interior surface with molded foam, raised rotation-restraining features, and inserting a mandrel into the mounting passage and receiving the molded foam, raised rotation-restraining features in contact with recesses formed on an outer surface of the mandrel to form the scrubber brush assembly.

In another aspect of the invention, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush having a scrubber brush body including a mounting passage with molded interior surfaces, the molded interior surfaces having molded foam, raised rotation-restraining features, and a mandrel having recesses formed on an outer surface of the mandrel, the mandrel being directly coupled to the molded interior surfaces by receiving the molded foam, raised rotation-restraining features in direct contact with the recesses.

In a third aspect of the invention, a scrubber brush is provided. The scrubber brush includes a scrubber brush body having a mounting passage with a molded interior surface with molded foam, raised rotation-restraining features configured and adapted to couple into recesses on an outer surface of a mandrel.

Other features and aspects of the present invention will become more fully apparent from the following detailed description of exemplary embodiments, the appended claims, and the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates an isometric view of a scrubber brush according to embodiments.

FIG. 2 illustrates an isometric end view of a scrubber brush according to embodiments.

FIG. 3A illustrates an end plan view of a scrubber brush according to embodiments.

FIGS. 3B-3C illustrate enlarged partial end plan view of scrubber brush with the outer profile removed illustrating the details of the molded foam, raised rotation-restraining features and grooves according to embodiments.

FIG. 3D-3F illustrates enlarged partial end plan views of other scrubber brushes with the outer profile removed illustrating the profile details of the molded foam, raised rotation-restraining features and grooves according to embodiments.

FIG. 4A illustrates a cross-sectioned side view of a scrubber brush assembly according to embodiments.

FIG. 4B illustrates a cross-sectioned end view of a scrubber brush assembly taken along section line 4B-4B of FIG. 4A according to embodiments.

FIG. 4C illustrates a cross-sectioned end view of a mandrel according to embodiments.

FIG. 5 illustrates a flowchart of a method of assembling a scrubber brush according to embodiments.

DETAILED DESCRIPTION

A scrubber brush is provided that includes a mounting passage having a molded inner surface having molded raised rotation-restraining features (e.g., ribs) adapted to couple (e.g., lock) to a mandrel. A mandrel is provided that is received into the mounting passage of the scrubber brush and interfaces with the molded foam, raised rotation-restraining features so as to form a scrubber brush assembly that may be used for cleaning a substrate and minimize relative rotation (e.g., rotational slippage) there between. For example, the scrubber brush assembly may be employed in a substrate processing system, such as a substrate cleaning system, to scrub and clean a major surface of a substrate during substrate processing. Further, the scrubber brush assembly may be used in other substrate processing systems.

Certain prior art scrubber brushes have included a smooth cylindrical inner surface. When used in cleaning operations on large substrates, this smooth surface may have a propensity to rotate on the mandrel due to increased friction forces between the brush and the substrate being scrubbed by the scrubber brush. This is especially true when substrates larger than 300 mm are being processed, such as those of 450 mm or above. According to method and apparatus embodiments of the invention, increased mechanical engagement between the mandrel and the brush are provided by embodiments of the invention. In particular, recessed portions on the mandrel interact with molded foam, raised rotation-restraining features on the brush interior surface in one or more embodiments. The molded foam, raised rotation-restraining features comprise the same material as the rest of the scrubber brush, thereby simplifying and lowering a cost of the scrubber brush and scrubber brush assembly. Accordingly, the scrubber brush may be mechanically locked in place relative to the mandrel (e.g., so as to prevent the scrubber brush from rotating relative to the mandrel). Accordingly, longer scrubber bushes may be used to process the larger substrates. These and other aspects of embodiments of the invention are described below with reference to FIGS. 1-5.

FIG. 1 is an isometric view of a scrubber brush 100 that may be included in a scrubber brush assembly 400 (FIG. 4) in accordance with one or more embodiments of the present invention. The scrubber brush 100 may be generally cylindrical in shape and have a scrubber brush body 101 with an exterior surface 102 that may be profiled. The profiled exterior surface 102 may include numerous molded exterior surface features 104, such as cylindrical nodules that project radially from a cylindrical surface 106. The molded exterior surface features 104 may be provided substantially along an entire length L of the scrubber brush 100 from a first end 107A to a second end 107B thereof. The molded exterior surface features 104 may be provided in any suitable pattern, such as in staggered rows, wherein the nodules of adjacent rows may be offset lengthwise. Other exterior surface shapes, nodule shapes, and/or nodule patterns may be used. Alternatively, in other embodiments, the exterior surface 102 of the scrubber brush 100 may include a smooth geometry and may be devoid of such nodules.

The entire scrubber brush body 101 of the scrubber brush 100 may, for example, be made of a resilient and porous foam material that may have sponge-like properties. For example, the foam material may comprise an open-cell foam, such as an open-cell polyurethane foam material. Other and/or different open-cell foam materials may be used, such as polyvinyl acetate (PVA), or polypropylene.

The scrubber brush 100 may include a mounting passage 108 having molded interior surfaces 110. As will be described below, a mandrel 420 may be inserted directly into the mounting passage 108 and may engage the molded interior surfaces 110 to directly couple the scrubber brush 100 to the mandrel 420 so as to form a scrubber brush assembly 400 (having utility for use during substrate processing). In one or more embodiments of the invention, the molded interior surfaces 110 may comprise molded foam, raised rotation-restraining features 112 that are configured and adapted to directly couple into recesses formed in an outer surface of a mandrel 420 (FIG. 4). These molded foam, raised rotation-restraining features 112 are pre-molded and may comprise the same foam material (e.g., open-cell foam) as is used to form the other portions of the brush body 101. In particular, the scrubber brush 100 including the exterior surface features 104 and the molded interior surface 110 with molded foam, raised rotation-restraining features 112 may be formed by including a foaming material in a suitably-shaped mold to arrive at the final configuration of the scrubber brush 100. In this manner, the cost and complexity of using a sleeve, as in previous designs, may be eliminated. In other words, the scrubber brush 100 is assembled onto the mandrel 400 without any intervening sleeve. In particular, the molded foam, raised rotation-restraining features 112 comprise open-cell foam. Accordingly, coupling of the mandrel 420 is by direct coupling (e.g., receiving) of the molded foam, raised rotation-restraining features 112 to recesses 422 in the mandrel 420, as will be apparent from the following.

FIG. 3B is an enlarged partial end view of the molded interior surfaces 110 with molded foam, raised rotation-restraining features 112 shown. In the depicted embodiment of FIGS. 1-3C, the molded foam, raised rotation-restraining features 112 comprise a plurality of molded foam ribs that extend longitudinally along an entire length L of the scrubber brush 100. As shown, there are four molded foam, raised rotation-restraining features 112 that extend longitudinally along the entire length L of the scrubber brush 100. However, any number of molded foam, raised rotation-restraining features 112 may be used, such as 2 or more, 3 or more, 4 or more, 5 or more, 6 or more, and the like. In the depicted embodiment, each of the molded foam, raised rotation-restraining features 112 comprises three sides. The sides include a first side 112A, a second side 112B, and a top side 112C. As installed on the mandrel 420, at least two of the sides (e.g., 112A, 112B), and preferably all three sides (112A, 112B, 112C) are provided in direct contact with the recesses 422 (FIGS. 4A-4B). In particular, the molded interior surfaces 110 are intentionally molded in a size that allows the scrubber brush body to be slightly compressed upon installation on the mandrel 420. This is possible because all surfaces of the interior molded surfaces 110 comprise open-cell foam. As shown in FIG. 3B, interspersed between the molded foam, raised rotation-restraining features 112 are molded foam grooves 114.

In more detail, and as best shown in FIGS. 3B and 3C, the molded interior surfaces 110 of the scrubber brush body 101 also comprise molded foam grooves 114 formed of the open-cell foam. The molded foam grooves 114 are interspersed between the molded foam, raised rotation-restraining features 112. The grooves may be equally spaced. The molded foam grooves 114 may each comprise a radiused bottom profile. In particular, the molded grooves 114 may extend longitudinally along substantially the entire length L of the scrubber brush 100. Other groove shapes may be used.

As shown in FIG. 3C, the molded foam, raised rotation-restraining features 112 have a height H of greater than about 1.5 mm. The height H is measured from the bottom of the molded foam groove 114. A top side 112C of the molded foam, raised rotation-restraining features 112 may have a width W of greater than about 4 mm, and a width W of between about 4 mm and 5.5 mm in some embodiments. Other height H and width W values may be used. Thus, it should be recognized that the exterior surface 102 having the molded foam, raised rotation-restraining features 112 comprises a compound surface. The molded interior surfaces 110 have relatively larger dimension and relatively smaller dimensions as measured relative to a center of the scrubber brush 100. The molded foam, raised rotation-restraining features 112 may include three sides (112A, 112B, and 112C) such as shown in FIG. 3C. At least two sides, and preferably all three sides (112A, 112B, and 112C) may be provided in direct contact with the recesses 422 (FIG. 4A-4B). This provides an excellent mechanical lock and prevents the scrubber brush 100 from twisting and/or rotating relative to the mandrel 420. Other shapes of the molded foam, raised rotation-restraining features 112 may be used. For example, the opposing sides of the molded foam, raised rotation-restraining features 112 may be sloped in some embodiments, such as shown in FIG. 3D, or the molded foam, raised rotation-restraining features 112 may have a truncated cylindrical profile as shown in FIG. 3E. Optionally, the molded foam grooves 114 may have other shapes, such as a truncated cylindrical shape, such as shown in FIG. 3F.

Referring now to FIGS. 4A-4C, the scrubber brush assembly 400 and components thereof are shown. The scrubber brush assembly 400 includes the scrubber brush 100 as described above having a mounting passage 108 that is received over a mandrel 420. The mandrel 420, as shown in cross section in FIG. 4C, includes recesses 422 formed on an outer surface 424 of the mandrel 420. The recesses 422 may be formed and extend along substantially an entire length of the mandrel 420. The mandrel 420 may include a plurality of ribs 426 extending along the length of the mandrel 420. The ribs 426 may number the same as the number of molded foam grooves 114 in the scrubber brush 100. Each of the ribs 426 is received into a respective one of the molded foam grooves 114 of the scrubber brush 100, as shown in FIG. 4B. The respective sides of the ribs may be provided in direct contact with the molded foam grooves 114.

Referring to FIG. 4C, the mandrel 420 may include a plurality of jets 428 (e.g., holes) that extend from a liquid passage 430 internal to the mandrel 420 to the outer surface 424 of the mandrel 420. The jets 428 allow chemicals to be jetted directly into the foam structure (e.g., open-cell foam) of the scrubber brush 100 from the mandrel 420 inserted in the mounting passage 108. The jets 428 may exit from tops of the ribs 428, and thus, may exit directly into the scrubber brush body 101. The jets 428 may be arranged in a row and may be generally evenly spaced along a length of the mandrel 420, as is shown in FIG. 4A. For example, 10 or more jets 428 may be provided on each rib 426. Other numbers and orientations of jets 428 may be employed. The ribs 426 of the mandrel 420 may be appropriately sized to couple and/or mate with respective molded foam groves 114 of the scrubber brush 100. Likewise, the recesses 422 may be appropriately sized to couple and/or mate with respective molded foam, raised rotation-restraining features 112 of the scrubber brush 100. In particular, the ribs 426 of the mandrel 420 are shaped so that the ribs 426 may be received within and provided in direct contact with at least two sides of the molded foam groove 114, and preferably all sides of the molded foam groove 114. The scrubber brush 100 may be received over the mandrel 420 during formation of a brush assembly 400 as described further below.

As shown in FIG. 4C, the recesses 422 may have radially-straight sides, or may optionally have sloped sides providing a slightly wider opening at the intersection with the ribs 426 that is adapted to receive the molded foam, raised rotation-restraining features 112. Other side shapes may be employed. The mandrel 420 may be formed from a material that is resistant to any chemistry used during substrate scrubbing. For example, the mandrel 420 may be formed (molded) from polyvinylidenefluoride (PVDF) or another suitable material.

FIG. 4A is a cross-sectional side view of the isometric view of the scrubber brush assembly of the scrubber brush 100 and mandrel 420 that may be used for substrate processing, such as to scrub a major surface of a substrate. In operation, the mandrel 420 may be driven/rotated, such as by the motor of a brush box or other tool, to cause the brush 100 to rotate relative to a substrate surface during a scrubbing operation. When the brush 100 needs to be replaced, the mandrel 420 may be easily removed from the scrubber brush 100 and a new scrubber brush 100 may be inserted thereon to form a new scrubber brush assembly 400. The new scrubber brush assembly 400 then may be used for substrate processing as previously described.

In more detail, the mandrel 420 may be coupled to a rotary mount 435 on one end and to a drive member 440, such as a drive shaft, on another end. As shown in FIG. 4A, to prevent the scrubber brush 100 from sliding along a length of the mandrel 420 in use, one end of the mandrel 420 may include a stop 445 formed thereon (e.g., a planar annular lip) that contacts an end of the scrubber brush 100 when the mandrel 420 is fully inserted over the mounting passage 108. The opposite end of the mandrel 420 may couple to the drive member 440. In the depicted embodiment, the mandrel 420 may be coupled to the drive member 440 by a splined member 440S and may be spaced by spacer 446. The spacer 446 may include another end stop 447 (e.g., a planar annular surface) that is received against the other end of the scrubber brush 100. The dimensions of the scrubber brush 100 and distances between the stops 445, 447 may be selected so that a slight axial compression of the scrubber brush 100 is achieved. To drive (e.g., rotate) the scrubber brush assembly 400, the splined member 440S of the drive member 440 may include one or more splines that may be coupled into like splines 420S formed in the end of the mandrel 420. Other types of coupling features may be used. Rotation of the drive member 440 therefore rotates the scrubber brush assembly 400. Bearings and bearing supports (not shown) stabilize the entire assembly of rotary mount 435, drive member 440, spacer 446, and the scrubber brush 100. Liquid chemicals may be provided through the rotary mount 435 and into the liquid passage 430 where it passes through the numerous jets 428 and directly into the scrubber brush body 101 of the scrubber brush 100. In some embodiments, the mandrel 420 may be driven by a driving coupling on the same end that the liquid is provided into the mandrel 420. Other coupling means may be provided.

FIG. 5 illustrates a method for assembling a scrubber brush assembly (e.g., 400). The method 500 includes, in 502, providing a scrubber brush (e.g., 100) having a scrubber brush body (e.g., 101) with a mounting passage (e.g., 108) having a molded interior surface (e.g., 102) with molded foam, raised rotation-restraining features (e.g., 112), and, in 504, inserting a mandrel (e.g., 420) into the mounting passage (e.g., 108) and receiving the molded foam, raised rotation-restraining features (e.g., 112) in contact with recesses (e.g., 422) formed on an outer surface (e.g., 424) of the mandrel (e.g., 420) to form the scrubber brush assembly (e.g., 400). Insertion may be accomplished manually by lining up respective molded foam, raised rotation-restraining features (e.g., 112) with respective recesses (e.g., 422) and sliding the scrubber brush (e.g., 100) over the mandrel (e.g., 420). Insertion may be aided by the use of a low-friction funnel received over the mandrel (e.g., 420), for example. Upon insertion, the molded foam, raised rotation-restraining features (e.g., 112) are provided in contact with recesses (e.g., 422), and the ribs (e.g., 426) are received in direct contact with the molded foam grooves (e.g., 114), with at least two sides, and preferably all three sides of the respective molded foam, raised rotation-restraining features (e.g., 112) and molded foam grooves (e.g., 114) in direct contact with the respective recesses (e.g., 422) and ribs (e.g., 426).

Accordingly, while the present invention has been disclosed in connection with exemplary embodiments thereof, it should be understood that other embodiments may fall within the scope of the invention, as defined by the following claims. 

The invention claimed is:
 1. A method of assembling a scrubber brush assembly, comprising: providing a scrubber brush having a scrubber brush body with a mounting passage having a molded interior surface with molded foam, raised rotation-restraining features; and inserting a mandrel into the mounting passage and receiving the molded foam, raised rotation-restraining features in contact with recesses formed on an outer surface of the mandrel to form the scrubber brush assembly.
 2. The method of claim 1, wherein the receiving of the molded foam, raised rotation-restraining features in contact with the recesses comprises substantially filling the recesses with the molded foam, raised rotation-restraining features.
 3. The method of claim 2, further comprising: engaging the foam molded, raised rotation-restraining features into the recesses along substantially an entire length L of the scrubber brush.
 4. The method of claim 1, further comprising: providing openings on the mandrel, the openings being configured and adapted to jet a liquid directly into the scrubber brush.
 5. A scrubber brush assembly, comprising: a scrubber brush having a scrubber brush body including a mounting passage with molded interior surfaces, the molded interior surfaces having molded foam, raised rotation-restraining features; and a mandrel having recesses formed on an outer surface of the mandrel, the mandrel being directly coupled to the molded interior surfaces by receiving the molded foam, raised rotation-restraining features in direct contact with the recesses.
 6. The scrubber brush assembly of claim 5, wherein the molded foam, raised rotation-restraining features comprise a plurality of molded foam ribs that extend longitudinally along substantially an entire length of the scrubber brush.
 7. The scrubber brush assembly of claim 6, wherein the molded foam, raised rotation-restraining features comprise four or more molded foam ribs.
 8. The scrubber brush assembly of claim 5, wherein the molded foam, raised rotation-restraining features comprise open-cell foam.
 9. The scrubber brush assembly of claim 5, wherein each of the molded foam, raised rotation-restraining features comprises at least two sides in direct contact with at least two sides of the recesses.
 10. The scrubber brush assembly of claim 5, wherein the molded interior surfaces further comprise molded foam grooves.
 11. The scrubber brush assembly of claim 10, wherein each of the molded foam grooves comprise a radiused bottom profile.
 12. The scrubber brush assembly of claim 10, wherein the molded foam grooves extend longitudinally along substantially an entire length of the scrubber brush.
 13. The scrubber brush assembly of claim 5, wherein the molded raised rotation-restraining features have a height of greater than about 1.5 mm.
 14. The scrubber brush assembly of claim 5, wherein a top side of the molded raised rotation-restraining features has a width of greater than about 4 mm.
 15. A scrubber brush, comprising: a scrubber brush body having a mounting passage with a molded interior surface with molded foam, raised rotation-restraining features configured and adapted to couple into recesses on an outer surface of a mandrel.
 16. The scrubber brush of claim 15, wherein the molded foam, raised rotation-restraining features comprise a plurality of molded ribs that extend longitudinally along substantially an entire length of the scrubber brush.
 17. The scrubber brush of claim 15, wherein the molded foam, raised rotation-restraining features comprise open-cell foam.
 18. The scrubber brush of claim 15, wherein the molded foam, raised rotation-restraining features have a height of greater than about 1.5 mm, and a width of greater than about 4 mm.
 19. The scrubber brush of claim 15, wherein the scrubber brush body comprises open-cell foam.
 20. The scrubber brush of claim 19, wherein the interior molded surface comprises molded foam grooves. 